Institut für Mikroproduktionstechnik Forschung Publikationen
Microfabricated Inductive Sensor for Position Measurements

Microfabricated Inductive Sensor for Position Measurements

Kategorien Konferenz (reviewed)
Jahr 2004
Autoren D. Dinulovic, H.H. Gatzen
Veröffentlicht in Proc. 8th Int. Symposium on Magnetic Materials, Processes and Devices, 206th Meet. of The Electrochemical Society 2004, Honolulu, Hawaii, USA, pp. 471-480