Institut für Mikroproduktionstechnik Forschung Publikationen
Concept for a Wafer Level Test System for Measuring Magnetic Film Properties

Concept for a Wafer Level Test System for Measuring Magnetic Film Properties

Kategorien Zeitschriften/Aufsätze
Jahr 2007
Autoren H.H. Gatzen, D. Dinulovic, E. Flick, H. Gerdes, K. Feindt, M. Eccarius
Veröffentlicht in Symposium on Magnetic Materials, Processes and Devices, 210th Meet. of The Electrochemical Society, Cancun, Mexico, 2006, ecs transactions, Vol. 3, Issue 25, pp. 165-177