Institut für Mikroproduktionstechnik Forschung Publikationen
Concept for Distinction Between the Circumferential and Sidewall Effects during Dicing of Single Crystal Silicon

Concept for Distinction Between the Circumferential and Sidewall Effects during Dicing of Single Crystal Silicon

Kategorien Konferenz (reviewed)
Jahr 2007
Autorinnen/Autoren S. Cvetkovic, H.H. Gatzen
Veröffentlicht in Proc. ASPE 22nd Ann. Meet. 2007, Dallas, TX, USA, pp. 386-389