Institut für Mikroproduktionstechnik Forschung Publikationen
Concept for Performance-Enhancement of Ultra-Precision Dicing for Bulk Hard and Brittle Materials in Micro Applications by Laser Dressing

Concept for Performance-Enhancement of Ultra-Precision Dicing for Bulk Hard and Brittle Materials in Micro Applications by Laser Dressing

Kategorien Konferenz (reviewed)
Jahr 2012
Autorinnen/Autoren M. Stompe, P. v. Witzendorff, S. Cvetkovic, A. Moalem, U. Stute, L. Rissing
Veröffentlicht in Microelectronic Engineering Journal (spec. issue), Proc. 37th Int. Conf. on Micro & Nanoeng., Berlin, Germany, Vol. 98, pp. 544-547