Thin film fabrication of highly sensitive earth magnetic field sensor
| Kategorien |
Konferenz (reviewed) |
| Jahr | 2014 |
| Autoren | A. Wienecke, L. Rissing |
| Veröffentlicht in | Tagungsband Smart Systems Integration 2014, 8th International Conference & Exhibition on integration issues of miniaturized systems - MEMS, NEMS, ICs and electronic components 2014, pp. 595–598 |
