Direct hot embossing of micro-elements by means of UV-structurable polyimide
Kategorien |
Konferenz (reviewed) |
Jahr | 2014 |
Autoren | M. Akin, M. Rezem, M. Rahlves, B. Roth, E. Reithmeier, L. Rissing |
Veröffentlicht in | MNE 2014, Lausanne, CH, September 22-26 |
DOI | 10.13140/2.1.1919.1367 |