Institut für Mikroproduktionstechnik Forschung Publikationen
Investigations on Micromolds for Dispensing Low Viscosity Epoxies for MEMS Applications

Investigations on Micromolds for Dispensing Low Viscosity Epoxies for MEMS Applications

Kategorien Konferenz (reviewed)
Jahr 2011
Autoren C. Leng, C. Ruffert, L. Rissing
Veröffentlicht in ECS Transactions, Vol. 33, Issue 34, Magnetic MEMS and Devices, pp. 81-92