Relationship between Removal Rate and Friction Force of a CMP Process for MEMS
| Kategorien |
Konferenz (reviewed) |
| Jahr | 2009 |
| Autorinnen/Autoren | S. Cvetkovic, D. Miletic, H.H. Gatzen |
| Veröffentlicht in | Proc. euspen 9th Int. Conf. 2009, San Sebastian, Spain, Vol. 2, pp. 499-502 |
