Investigation of Fluidic Additives on the Nanohardness During Polishing
| Kategorien |
Konferenz (reviewed) |
| Jahr | 2009 |
| Autorinnen/Autoren | M.C. Wurz, F. Pape, M. Wark, H.H. Gatzen |
| Veröffentlicht in | Proc. WTC 09, Kyoto, Japan, K-331, pp. 698 |
