Resistance of Multilayer Diamond-like Carbon (DLC) Coatings for MEMS Applications against Oscillating Wear
| Kategorien |
Konferenz (reviewed) |
| Jahr | 2009 |
| Autorinnen/Autoren | F. Pape, H.H. Gatzen |
| Veröffentlicht in | Proc. WTC 09, Kyoto, Japan, G-114, pp.112 |
