Electrical feed through for tool integrated high temperature applications
| Kategorien |
Konferenz (reviewed) |
| Jahr | 2017 |
| Autorinnen/Autoren | Dencker F, Kolodziejczyk F, Wurz MC |
| Veröffentlicht in | International Conference and Exhibition on Integration Issues of Miniaturized Systems 2017, SSI 2017 |
| ISBN | 978-395735057-2 |
