Institut für Mikroproduktionstechnik Forschung Publikationen
Electrical feed through for tool integrated high temperature applications

Electrical feed through for tool integrated high temperature applications

Kategorien Konferenz (reviewed)
Jahr 2017
Autorinnen/Autoren Dencker F, Kolodziejczyk F, Wurz MC
Veröffentlicht in International Conference and Exhibition on Integration Issues of Miniaturized Systems 2017, SSI 2017
ISBN 978-395735057-2