ForschungPublikationen
An Electromagnetically Actuated Bi-stable MEMS Optical Microswitch

An Electromagnetically Actuated Bi-stable MEMS Optical Microswitch

Kategorien Konferenz (reviewed)
Jahr 2003
Autoren H.H. Gatzen, E. Obermeier, T. Kohlmeier, T. Budde, H.D. Ngo, B. Mukhopadhyay, M. Farr
Veröffentlicht in Proc. Transducers 03, Boston, MA, USA, pp. 1514-1517