An Electromagnetically Actuated Bi-stable MEMS Optical Microswitch
| Kategorien |
Konferenz (reviewed) |
| Jahr | 2003 |
| Autoren | H.H. Gatzen, E. Obermeier, T. Kohlmeier, T. Budde, H.D. Ngo, B. Mukhopadhyay, M. Farr |
| Veröffentlicht in | Proc. Transducers 03, Boston, MA, USA, pp. 1514-1517 |
