Thick Sputter Deposited NiFe 45/55 Films for Flux Guides In Magnetic MEMS
| Kategorien |
Konferenz (reviewed) |
| Jahr | 2003 |
| Autoren | T. Budde, H.H. Gatzen |
| Veröffentlicht in | Proc. 16th Soft Magnetic Materials Conf. 2003, Düsseldorf, Germany, pp. 867-872 |
