Institut für Mikroproduktionstechnik Forschung Publikationen
Ni Electroplating in SU-8 Microforms for Fabricating Self Supporting Microstructures

Ni Electroplating in SU-8 Microforms for Fabricating Self Supporting Microstructures

Kategorien Konferenz (reviewed)
Jahr 2002
Autoren T. Kohlmeier, H.H. Gatzen
Veröffentlicht in Proc. 7th Int. Symposium on Magnetic Materials, Processes and Devices, 202nd Meet. of The Electrochemical Society 2002, Salt Lake City, UT, USA, pp. 137-148