Ni Electroplating in SU-8 Microforms for Fabricating Self Supporting Microstructures
Kategorien |
Konferenz (reviewed) |
Jahr | 2002 |
Autoren | T. Kohlmeier, H.H. Gatzen |
Veröffentlicht in | Proc. 7th Int. Symposium on Magnetic Materials, Processes and Devices, 202nd Meet. of The Electrochemical Society 2002, Salt Lake City, UT, USA, pp. 137-148 |