Institut für Mikroproduktionstechnik Forschung Publikationen
Resistance of Multilayer Diamond-like Carbon (DLC) Coatings for MEMS Applications against Oscillating Wear

Advances in European Magnetic MEMS Technology

Kategorien Konferenz (reviewed)
Jahr 2002
Autoren H.H. Gatzen
Veröffentlicht in Invited paper, Proc. 7th Int. Symposium on Magnetic Materials, Processes and Devices, 202nd Meet. of The Electrochemical Society 2002, Salt Lake City, UT, USA, pp. 90-108