ForschungPublikationen
Technological Challenges in Ultraprecision Grinding of Flexural Microsensor

Technological Challenges in Ultraprecision Grinding of Flexural Microsensor

Kategorien Konferenz (reviewed)
Jahr 1999
Autoren H.H. Gatzen, M. Beck, J. Zeadan
Veröffentlicht in Proc. euspen 1st Int. Conf. 1999, Bremen, Germany, Vol. 1, pp. 538-541