ForschungPublikationen
Chemical-mechanical Planarization of a SU-8/Copper combination for MEMS

Chemical-mechanical Planarization of a SU-8/Copper combination for MEMS

Kategorien Zeitschriften/Aufsätze
Jahr 2003
Autoren H.H. Gatzen, C. Morsbach, C. Kourouklis
Veröffentlicht in Proc. ASPE 18th Ann. Meet. 2003, Portland, Oregon, USA, Sensors & Actuators A: Physical, Vol. 106, No. 1-3, pp. 268-271