Institut für Mikroproduktionstechnik Forschung Publikationen
Resistance of Multilayer Diamond-like Carbon (DLC) Coatings for MEMS Applications against Oscillating Wear

Electromagnetic Dual-position Actuator for Measurement Applications

Kategorien Konferenz (reviewed)
Jahr 2006
Autoren H. Gerdes, D. Dinulovic, H.H. Gatzen
Veröffentlicht in Proc. Actuator 2006, 10th Int. Conf. on New Actuators, Bremen, Germany, pp. 824-827