Combining Mechanical Micromachining and Glass Bonding to Fabricate Robust Micro Structures
| Kategorien |
Konferenz (reviewed) |
| Jahr | 2006 |
| Autoren | K. Halalo, H.H. Gatzen |
| Veröffentlicht in | Proc. EUSPEN 6th Int. Conf. 2006, Baden, Austria |
