ForschungPublikationen
Combining Mechanical Micromachining and Glass Bonding to Fabricate Robust Micro Structures

Combining Mechanical Micromachining and Glass Bonding to Fabricate Robust Micro Structures

Kategorien Konferenz (reviewed)
Jahr 2006
Autoren K. Halalo, H.H. Gatzen
Veröffentlicht in Proc. EUSPEN 6th Int. Conf. 2006, Baden, Austria