Modeling CMP - Investigation of the Chemical Attack on the Mechanical Properties of Bulk Material
| Kategorien |
Konferenz (reviewed) |
| Jahr | 2006 |
| Autoren | H.H. Gatzen, S. Cvetkovic |
| Veröffentlicht in | Proc. EUSPEN 6th Int. Conf. 2006, Baden, Austria |
