ForschungPublikationen
Modeling CMP - Investigation of the Mechanical Removal Mechanism

Modeling CMP - Investigation of the Mechanical Removal Mechanism

Kategorien Konferenz (reviewed)
Jahr 2005
Autoren S. Cvetkovic, K.-H. Wu, H.H. Gatzen
Veröffentlicht in Proc. ASPE 20th Ann. Meet. 2005, Norfolk, Virginia, USA, pp. 500-503