Modeling CMP - Investigation of the Mechanical Removal Mechanism
| Kategorien |
Konferenz (reviewed) |
| Jahr | 2005 |
| Autoren | S. Cvetkovic, K.-H. Wu, H.H. Gatzen |
| Veröffentlicht in | Proc. ASPE 20th Ann. Meet. 2005, Norfolk, Virginia, USA, pp. 500-503 |
