ForschungPublikationen
Investigation on the Impact on Process Quality When Utilizing Different Pads during Chemical-Mechanical Polishing of MEMS

Investigation on the Impact on Process Quality When Utilizing Different Pads during Chemical-Mechanical Polishing of MEMS

Kategorien Konferenz (reviewed)
Jahr 2007
Autoren S. Cvetkovic, H.H. Gatzen
Veröffentlicht in Proc. ASPE 22nd Ann. Meet. 2007, Dallas, TX, USA, pp. 469-472