Investigation on the Impact on Process Quality When Utilizing Different Pads during Chemical-Mechanical Polishing of MEMS
Kategorien |
Konferenz (reviewed) |
Jahr | 2007 |
Autoren | S. Cvetkovic, H.H. Gatzen |
Veröffentlicht in | Proc. ASPE 22nd Ann. Meet. 2007, Dallas, TX, USA, pp. 469-472 |