ForschungPublikationen
Dicing Process for the Device Separation of a Slider with an Integrated Microactuator (SLIM)

Dicing Process for the Device Separation of a Slider with an Integrated Microactuator (SLIM)

Kategorien Konferenz (reviewed)
Jahr 2008
Autoren S. Cvetkovic, H. Saalfeld, H.H. Gatzen
Veröffentlicht in Proc. ASPE 23rd Ann. Meet. 2008 and 12th ICPE, Portland, OR, USA, pp. 380-383