Institut für Mikroproduktionstechnik Forschung Publikationen
Optimization of the Adhesion of Diamond-like Carbon on Glass Substrates for Microelectro Mechanical Systems by Nanoindentational Studies

Optimization of the Adhesion of Diamond-like Carbon on Glass Substrates for Microelectro Mechanical Systems by Nanoindentational Studies

Kategorien Konferenz (reviewed)
Jahr 2008
Autoren F. Pape, H.H. Gatzen
Veröffentlicht in Leeds-Lyon Symposium on Tribology 2008, Leeds, UK