Magnetic Micro Electro-Mechanical Systems (MEMS) for Sensor and Actuator Applications
Kategorien |
Konferenz (reviewed) |
Jahr | 2008 |
Autoren | H.H. Gatzen |
Veröffentlicht in | PRiME 2008 Meeting, Honolulu, HI, USA, The Electrochemical Society, MA 2008-2, Abs. 2601.pdf |