ForschungPublikationen
Investigations on Silicon Nitride Thin Films Deposited be PECVD

Investigations on Silicon Nitride Thin Films Deposited be PECVD

Kategorien Konferenz (reviewed)
Jahr 2011
Autoren C. Ruffert, F. Pape, L. Rissing
Veröffentlicht in European Congress and Exhibition on Advanced Materials and Processes (Euromat 2011), Montpellier, France, 2011