Investigations on Silicon Nitride Thin Films Deposited be PECVD
Kategorien |
Konferenz (reviewed) |
Jahr | 2011 |
Autoren | C. Ruffert, F. Pape, L. Rissing |
Veröffentlicht in | European Congress and Exhibition on Advanced Materials and Processes (Euromat 2011), Montpellier, France, 2011 |