ForschungPublikationen
Slurry Comparison for Chemical-mechanical Polishing (CMP) of Silicon Carbide (SiC)

Slurry Comparison for Chemical-mechanical Polishing (CMP) of Silicon Carbide (SiC)

Kategorien Konferenz (reviewed)
Jahr 2012
Autoren J. Rittinger, S. Cvetkovic, L. Rissing
Veröffentlicht in Proc. 12th euspen Int. Conf. 2012, Stockholm, Sweden, pp. 145-148