ForschungPublikationen
Thinning Process Optimization for an Ultra-thin 3D Magnetic Field Sensor

Thinning Process Optimization for an Ultra-thin 3D Magnetic Field Sensor

Kategorien Konferenz (reviewed)
Jahr 2012
Autoren S. Cvetkovic, R. Kruppe, L. Rissing
Veröffentlicht in Smart Systems Integration (SSI 2012), 6th Int. Conf. & Exhibition, Zurich, Swiss, paper 17
ISBN 978-3-8007-3423-8