ForschungPublikationen
Integration of Electroplated CoFe in Trench Type Flux Guides for Magnetic MEMS Applications

Integration of Electroplated CoFe in Trench Type Flux Guides for Magnetic MEMS Applications

Kategorien Konferenz (reviewed)
Jahr 2012
Autoren J. Chen, S. Cvetkovic, L. Rissing
Veröffentlicht in Trans. 222nd ECS Meeting, Honolulu, Hawaii, Vol. 50, No. 10, pp. 157-166