ForschungPublikationen
Concept for Performance-Enhancement of Ultra-Precision Dicing for Bulk Hard and Brittle Materials in Micro Applications by Laser Dressing

Concept for Performance-Enhancement of Ultra-Precision Dicing for Bulk Hard and Brittle Materials in Micro Applications by Laser Dressing

Kategorien Konferenz (reviewed)
Jahr 2012
Autoren M. Stompe, P. v. Witzendorff, S. Cvetkovic, A. Moalem, U. Stute, L. Rissing
Veröffentlicht in Microelectronic Engineering Journal (spec. issue), Proc. 37th Int. Conf. on Micro & Nanoeng., Berlin, Germany, Vol. 98, pp. 544-547