Institut für Mikroproduktionstechnik Forschung Publikationen
Ultra-precision Dicing Process Separation: Effect of Circumferential and Sidewall Grinding

Ultra-precision Dicing Process Separation: Effect of Circumferential and Sidewall Grinding

Kategorien Konferenz (reviewed)
Jahr 2012
Autoren M. Stompe, S. Cvetkovic, P. Taptimthong, L. Rissing
Veröffentlicht in Proc. 12th euspen Int. Conf. 2012, Stockholm, Sweden, pp. 169-172