Ultra-precision Dicing Process Separation: Effect of Circumferential and Sidewall Grinding
Kategorien |
Konferenz (reviewed) |
Jahr | 2012 |
Autoren | M. Stompe, S. Cvetkovic, P. Taptimthong, L. Rissing |
Veröffentlicht in | Proc. 12th euspen Int. Conf. 2012, Stockholm, Sweden, pp. 169-172 |