ForschungPublikationen
Ultra-precision Manufacturing of Porcelain-based MEMS

Ultra-precision Manufacturing of Porcelain-based MEMS

Kategorien Konferenz (reviewed)
Jahr 2014
Autoren M. Stompe, L. Rissing
Veröffentlicht in Proc. 8th Int. Conf. & Exh. on Integration Issues of Miniaturized Systems - MEMS, NEMS, ICs and Electronic Components, Vienna 2014, Vienna, Austria, pp. 573-577