ForschungPublikationen
Dicing study for high productive micro production of porcelain-based ceramic for MEMS

Dicing study for high productive micro production of porcelain-based ceramic for MEMS

Kategorien Konferenz (reviewed)
Jahr 2013
Autoren M. Stompe, S. Cvetkovic, L. Rissing
Veröffentlicht in Proc.13th euspen Int. Conf., Berlin, Germany, pp. 92-95