Dicing study for high productive micro production of porcelain-based ceramic for MEMS
Kategorien |
Konferenz (reviewed) |
Jahr | 2013 |
Autoren | M. Stompe, S. Cvetkovic, L. Rissing |
Veröffentlicht in | Proc.13th euspen Int. Conf., Berlin, Germany, pp. 92-95 |