ForschungPublikationen
Investigations on Eutectic Bonding of Polyimide Structures for MEMS Applications

Investigations on Eutectic Bonding of Polyimide Structures for MEMS Applications

Kategorien Konferenz (reviewed)
Jahr 2013
Autoren T. Creutzburg, S. Cvetkovic, J. Rittinger, L. Rissing
Veröffentlicht in Smart System Integration (SSI 2013), paper 106, Amsterdam, The Netherlands
ISBN 978-3-8007-3490-0