Institut für Mikroproduktionstechnik Forschung Publikationen
Resistance of Multilayer Diamond-like Carbon (DLC) Coatings for MEMS Applications against Oscillating Wear

Design and Fabrication of a Microactuator for a Hearing Aid

Kategorien Zeitschriften/Aufsätze (reviewed)
Jahr 2012
Autoren T. Creutzburg, L. Rissing, T. Lenarz, G. Reuter
Veröffentlicht in Int. Journal of Applied Electromagnetics and Mechanics, Vol. 39, pp. 471-477