Investigations on Micromolds for Dispensing Low Viscosity Epoxies for MEMS Applications
Kategorien |
Konferenz (reviewed) |
Jahr | 2011 |
Autoren | C. Leng, C. Ruffert, L. Rissing |
Veröffentlicht in | ECS Transactions, Vol. 33, Issue 34, Magnetic MEMS and Devices, pp. 81-92 |