Sputtering of SmCo Thin Films and Integration into a Ferrofluidic Microactuator
Kategorien |
Konferenz (reviewed) |
Jahr | 2011 |
Autoren | J. Chen, D. Hoheisel, L. Rissing |
Veröffentlicht in | IEEE International Magnetics Conf. (Intermag 2011), Taipei, Taiwan, 2011 |