ForschungPublikationen
Design, Fabrication and Calibration of Capacitive Air Gap Sensors for Application in Levitation based Guides for Microactuators.

Design, Fabrication and Calibration of Capacitive Air Gap Sensors for Application in Levitation based Guides for Microactuators.

Kategorien Verschiedenes
Jahr 2009
Autoren B. Denkena, H.H. Gatzen, H. Kayapinar, F. Pape
Veröffentlicht in Proc. IEEE Sensors 2009, Christchurch, New Zealand, pp. 1915-1918