ForschungPublikationen
Relationship between Removal Rate and Friction Force of a CMP Process for MEMS

Relationship between Removal Rate and Friction Force of a CMP Process for MEMS

Kategorien Konferenz (reviewed)
Jahr 2009
Autoren S. Cvetkovic, D. Miletic, H.H. Gatzen
Veröffentlicht in Proc. euspen 9th Int. Conf. 2009, San Sebastian, Spain, Vol. 2, pp. 499-502