Resistance of Multilayer Diamond-like Carbon (DLC) Coatings for MEMS Applications against Oscillating Wear
Kategorien |
Konferenz (reviewed) |
Jahr | 2009 |
Autoren | F. Pape, H.H. Gatzen |
Veröffentlicht in | Proc. WTC 09, Kyoto, Japan, G-114, pp.112 |