ForschungPublikationen
Evaluation of a Prototype CMP Machine for Improving the Global Planarization by MEMS

Evaluation of a Prototype CMP Machine for Improving the Global Planarization by MEMS

Kategorien Konferenz (reviewed)
Jahr 2009
Autoren S. Cvetkovic, H.H. Gatzen
Veröffentlicht in Proc. ASPE, 24th Ann. Meet. 2009, Monterey, CA, USA, pp. 315-318