Cross Crown Nanogrinding of a Chiplet for a Slider with an integrated Microactuator (SLIM)
| Kategorien |
Konferenz (reviewed) |
| Jahr | 2009 |
| Autoren | H.H. Gatzen, S. Cvetkovic |
| Veröffentlicht in | Proc. ASPE, 24th Ann. Meet. 2009, Monterey, CA, USA, pp. 95 |
