ForschungPublikationen
Cross Crown Nanogrinding of a Chiplet for a Slider with an integrated Microactuator (SLIM)

Cross Crown Nanogrinding of a Chiplet for a Slider with an integrated Microactuator (SLIM)

Kategorien Konferenz (reviewed)
Jahr 2009
Autoren H.H. Gatzen, S. Cvetkovic
Veröffentlicht in Proc. ASPE, 24th Ann. Meet. 2009, Monterey, CA, USA, pp. 95