Thin Film Fabrication and System Integration Test Run for a Microactuator for a Tuneable Lens
Kategorien |
Konferenz (reviewed) |
Jahr | 2014 |
Autoren | D. Hoheisel, L. Rissing |
Veröffentlicht in | Proc. SPIE 8973, Micromachining and Microfabrication Process Technology XIX, 897305, San Francisco, USA |