Institut für Mikroproduktionstechnik Forschung Publikationen
Resistance of Multilayer Diamond-like Carbon (DLC) Coatings for MEMS Applications against Oscillating Wear

Vertical Interconnect Access (VIA) in Technical Porcelain for MEMS

Kategorien Konferenz (reviewed)
Jahr 2015
Autoren M. Stompe, L. Rissing
Veröffentlicht in Smart System Integration, Copenhagen, proceedings 2015, pp. 461-465