ForschungPublikationen
Direct hot embossing of micro-elements by means of photostructurable polyimide

Direct hot embossing of micro-elements by means of photostructurable polyimide

Kategorien Zeitschriften/Aufsätze (reviewed)
Jahr 2016
Autoren M. Akin, M. Rezem, M. Rahlves, K. Cromwell, B. Roth, E. Reithmeier, M. Wurz, L. Rissing, H.-J. Maier
Veröffentlicht in Journal of Micro/Nanolithography, MEMS, and MOEMS (JM3)