Stress Reduction in sputtered thin NiFe 81/19 layers for Magnetic Field Sensor
Kategorien |
Konferenz (reviewed) |
Jahr | 2016 |
Autoren | Jogschies L, Rittinger J,Klaas D, Wurz MC |
Veröffentlicht in | 3rd International Conference on System-integrated Intelligence: New Challenges for Product and Production Engineering, SysInt 2016, Procedia Technology 26, pp. 162-168 |
DOI | 10.1016/j.protcy.2016.08.022 |
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